HIGHTEMP
Summary of public USPTO data
- Owner
- KLA Corporation
- Status
- Live/Registered
- Serial number
- 99244618
- Registration number
- 8360994
- Filing date
- 2025-06-20
- Registration date
- 2026-07-21
- International classes
- 9
Goods and services
Class 9
- Apparatus and instruments for physics, namely, in-situ semiconductor process monitoring systems comprised of wafer based electronic sensors, thermal measurement elements, and data acquisition electronics for measuring temporal and spatial temperature profiles inside semiconductor processing equipment
- Diagnostic equipment for research laboratory use, namely, wafer based thermal measurement devices for monitoring process tool thermal uniformity
- Computer software, recorded, for analyzing and displaying temperature and process tool thermal data
- Computer software applications, downloadable, for collecting, processing, visualizing and reporting wafer based thermal measurement data