CRYOTEMP
Summary of public USPTO data
- Owner
- KLA Corporation
- Status
- Live/Registered
- Serial number
- 99244602
- Registration number
- 8360993
- Filing date
- 2025-06-20
- Registration date
- 2026-07-21
- International classes
- 9
Goods and services
Class 9
- Apparatus and instruments for physics, namely, in-situ semiconductor process temperature measurement wafers equipped with embedded electronic temperature sensors for monitoring wafer level thermal profiles inside semiconductor process chambers, particularly plasma etch chambers
- Diagnostic equipment for research laboratory use, namely, temperature sensing wafers for measuring wafer temperature and environmental conditions during cryogenic plasma etch processes
- Measures for measuring temperature distribution and thermal profiles within etch chambers
- Computer software, recorded, for controlling, collecting, analyzing, and displaying cryogenic wafer temperature measurement data
- Computer software applications, downloadable, for controlling, collecting, analyzing, and displaying cryogenic wafer temperature measurement data