SCANNERTEMP
Summary of public USPTO data
- Owner
- KLA Corporation
- Status
- Live/Registered
- Serial number
- 99220330
- Registration number
- 8385616
- Filing date
- 2025-06-05
- Registration date
- 2026-08-04
- International classes
- 9
Goods and services
Class 9
- Apparatus and instruments for physics, namely, wafer temperature measurement devices, in situ temperature sensors for semiconductor manufacturing, lithography scanner temperature monitoring instruments for dry, immersion, and Extreme Ultraviolet (EUV) systems, scientific instruments for recording temporal and spatial wafer temperature data
- Electronic sensors for temperature measurement within semiconductor lithography systems
- environmental data acquisition systems, namely, data processing apparatus for wafer temperature and chamber condition analysis, modeling, and process optimization
- Recorded computer software for semiconductor wafer process monitoring and analysis
- Downloadable computer software applications for semiconductor wafer process monitoring and analysis