CMP-TEMP
Summary of public USPTO data
- Owner
- KLA Corporation
- Status
- Live/Registered
- Serial number
- 99244576
- Registration number
- 8360992
- Filing date
- 2025-06-20
- Registration date
- 2026-07-21
- International classes
- 9
Goods and services
Class 9
- Apparatus and instruments for physics, namely, measuring devices for monitoring and measuring environmental conditions inside semiconductor processing chambers, including Chemical Mechanical Planarization (CMP) systems
- Diagnostic equipment for research laboratory use, namely, pressure and temperature sensing wafers for measuring temperature, pressure, thermal profile, and chamber environmental conditions during semiconductor wafer processing
- Measures for measuring pressure and temperature distribution, thermal profiles, and environmental characteristics within semiconductor process chambers
- Computer software, recorded, for collecting, analyzing, and displaying pressure and temperature measurement data obtained during semiconductor processing
- Computer software applications, downloadable, for collecting, analyzing, and displaying pressure and temperature measurement data obtained during semiconductor processing