UV WAFER
Summary of public USPTO data
- Owner
- KLA Corporation
- Status
- Live/Registered
- Serial number
- 99244563
- Registration number
- 8418963
- Filing date
- 2025-06-20
- Registration date
- 2026-09-01
- International classes
- 9
Goods and services
Class 9
- Apparatus and instruments for physics, namely, ultraviolet (UV) radiation-measurement wafers equipped with embedded UV-sensitive electronic sensors for monitoring wafer level UV exposure and UV intensity inside semiconductor processing chambers
- Diagnostic equipment for research laboratory use, namely, UV sensing wafers for measuring ultraviolet radiation levels, thermal behavior, and chamber environmental conditions during semiconductor wafer processing
- Measures for measuring UV radiation, UV power, and environmental characteristics within semiconductor process chambers
- Computer software, recorded, for collecting, analyzing, and displaying ultraviolet radiation measurement data obtained during semiconductor processing
- Computer software applications, downloadable, for collecting, analyzing, and displaying ultraviolet radiation measurement data obtained during semiconductor processing