EUV WAFER
Summary of public USPTO data
- Owner
- KLA Corporation
- Status
- Live/Registered
- Serial number
- 99244546
- Registration number
- 8417385
- Filing date
- 2025-06-20
- Registration date
- 2026-08-25
- International classes
- 9
Goods and services
Class 9
- Apparatus and instruments for physics, namely, extreme ultraviolet (EUV) radiation-measurement wafers equipped with embedded EUV sensitive electronic sensors for monitoring wafer level EUV exposure and environmental conditions inside EUV semiconductor processing systems
- Diagnostic equipment for research laboratory use, namely, EUV sensing wafers for measuring EUV radiation levels and chamber environmental characteristics during semiconductor wafer processing
- Measures for measuring EUV radiation distribution and environmental characteristics within semiconductor process chambers
- Computer software, recorded, for collecting, analyzing, and displaying EUV radiation and environmental characteristic data obtained during semiconductor processing
- Computer software applications, downloadable, for collecting, analyzing, and displaying EUV radiation and environmental characteristic data obtained during semiconductor processing