ALIGNMENT WAFER
Summary of public USPTO data
- Owner
- KLA Corporation
- Status
- Live/Registered
- Serial number
- 99220343
- Registration number
- 8267239
- Filing date
- 2025-06-05
- Registration date
- 2026-05-19
- International classes
- 9
Goods and services
Class 9
- Apparatus and instruments for physics, namely, process monitoring wafers, in-situ process monitoring wafers for detecting and measuring the offset between a wafer and a chuck, wafer edge-mounted optical sensors for monitoring and correcting wafer placement, wafers for providing output data to improve alignment and placement of wafers in semiconductor manufacturing tools, optical sensor-equipped wafers for process control and alignment verification
- Diagnostic equipment for research laboratory use, namely, process monitoring wafers, in-situ process monitoring wafers for detecting and measuring the offset between a wafer and a chuck, wafer edge-mounted optical sensors for monitoring and correcting wafer placement, wafers for providing output data to improve alignment and placement of wafers in semiconductor manufacturing tools, optical sensor-equipped wafers for process control and alignment verification
- Optical instruments, namely, process monitoring wafers, in-situ process monitoring wafers for detecting and measuring the offset between a wafer and a chuck, wafer edge-mounted optical sensors for monitoring and correcting wafer placement, wafers for providing output data to improve alignment and placement of wafers in semiconductor manufacturing tools, optical sensor-equipped wafers for process control and alignment verification