AUTOMATION FOUP

Summary of public USPTO data

Goods and services

Apparatus and instruments for physics, namely, automated front-opening unified pods (FOUPs) being a semiconductor wafer transportation and storage containers with integrated electronics for charging, data collection, and communication with semiconductor wafers during semiconductor manufacturing processes
Diagnostic equipment for research laboratory use, namely, FOUP-based wafer monitoring systems comprising electronic sensors for monitoring wafer position, measuring surface conditions and detecting defects during controlled experiments and tool qualification processes in semiconductor fabrication environments
FOUP-integrated systems, namely, data processing apparatus for acquisition, storage, and transmission of wafer environmental and performance data
Electronic positional and measurement sensors and communication modules for collecting and transmitting wafer-related data within semiconductor processing equipment
Recorded computer software for managing wafer data collection and FOUP operations
Downloadable computer software applications for monitoring wafer conditions and controlling FOUP charging and communication functions